The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Oct. 22, 2023
Semes Co., Ltd., Cheonan-si, KR;
SEMES CO., LTD., Cheonan-si, KR;
Abstract
Provided is an autonomous mobile robot (AMR) and semiconductor manufacturing equipment including the same, the AMR including an autonomous mobile module capable of autonomously moving along a certain autonomous motion path between a plurality of semiconductor manufacturing apparatuses disposed in semiconductor manufacturing equipment for manufacturing semiconductor devices, to supply materials to or perform maintenance on any one of the plurality of semiconductor manufacturing apparatuses in the semiconductor manufacturing equipment, and a loading module provided as a transferable structure including a manipulator for supplying materials to or performing maintenance on any one of the plurality of semiconductor manufacturing apparatuses, and docked to and transferred by the autonomous mobile module, wherein, in the autonomous mobile module, a male coupler rotatably protruding from a docking surface of the autonomous mobile module so as to be inserted into a female coupler of the loading module is flexibly supported by a first elastic member.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile