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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12769048 B1

PDFFull Text
Date of Patent:
Oct. 20, 2026

Filed:

Apr. 10, 2023

Optical devices having barrier layers to facilitate reduced hardmask diffusion and/or hardmask residue, and related methods

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Rui Li, San Diego, CA (US);

Takashi Kuratomi, San Jose, CA (US);

Alexia Adilene Portillo Rivera, Sunnyvale, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Sathavaram I Reddy

Int. Cl.
CPC ...
F21V 8/00 (2006.01); C23C 14/08 (2006.01); C23C 14/10 (2006.01); C23C 14/22 (2006.01); C23C 14/34 (2006.01); G02B 5/18 (2006.01);
U.S. Cl.
CPC ...
G02B 6/0065 (2013.01); C23C 14/083 (2013.01); C23C 14/10 (2013.01); C23C 14/228 (2013.01); C23C 14/34 (2013.01); G02B 6/0016 (2013.01); G02B 5/1857 (2013.01);
Abstract

Embodiments of the present disclosure generally relate to optical devices having barrier layers for reduced hardmask diffusion and/or hardmask residue, and related methods of forming the optical devices. In one or more embodiments, a plurality of optical device structures each include a barrier layer disposed between a device function layer and a hardmask layer prior to removal of the hardmask layer.

Find Patent Forward Citations

Li, Rui. (2026). Optical devices having barrier layers to facilitate reduced hardmask diffusion and/or hardmask residue, and related methods (U.S. Patent No. 12769048). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12769048

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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