The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2026

Filed:

Oct. 07, 2022
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, 's-Gravenhage, NL;

Inventors:

Abbas Mohtashami, 's-Gravenhage, NL;

Clara Inés Osorio Tamayo, Delft, NL;

Kodai Hatakeyama, Pijnacker, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/032 (2006.01); G01B 7/26 (2006.01); G01Q 60/54 (2010.01); G01Q 70/14 (2010.01); G01R 33/26 (2006.01); G01R 33/44 (2006.01);
U.S. Cl.
CPC ...
G01R 33/032 (2013.01); G01B 7/26 (2013.01); G01Q 60/54 (2013.01); G01Q 70/14 (2013.01); G01R 33/26 (2013.01); G01R 33/448 (2013.01);
Abstract

A metrology device for determining metrological characteristics of a sample is described that includes a probe, a scanning mechanism, a radiation source, an optical sensor and a signal processor. In operation the scanning mechanism displaces the probe relative to the sample, along a surface of the sample. The probe has a diamond tip with one or more nitrogen-vacancy centers and is irradiated by the radiation source with photon radiation to excite the diamond tip to emit fluorescent light. The optical sensor provides a sense signal indicative of an intensity of the emitted fluorescent light and the signal processor processes the sense signal to compute at least one characteristic of a feature present in the sample.


Find Patent Forward Citations

Mohtashami, Abbas. (2026). Metrology device and method (U.S. Patent No. 12768912). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12768912

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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