The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2026

Filed:

Jan. 30, 2025
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Tomohiro Sugimoto, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M 11/02 (2006.01); G01B 9/0209 (2022.01);
U.S. Cl.
CPC ...
G01M 11/0271 (2013.01); G01B 9/0209 (2013.01); G01M 11/0207 (2013.01); G01M 11/0221 (2013.01);
Abstract

An apparatus includes a first light source for illuminating a chart including an index surface on which an index is provided, an objective lens for guiding index light emitted from the chart to an optical system, a first element for receiving the index light reflected on an optical surface in the optical system, an interferometer configured to include a second light source and a second element, and acquire a wavefront of measurement light, the measurement light being test light reflected on the target surface, and a reduction unit for reducing an intensity of a signal of light reflected on an optical surface other than the target surface, of the test light reflected on the plurality of optical surfaces and received by the second element.


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Sugimoto, Tomohiro. (2026). Apparatus, measurement method, and manufacturing method (U.S. Patent No. 12768746). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12768746

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