Vibration sensor with air venting channels

Abstract

The present invention relates to a vibration sensor comprising a carrier substrate comprising a first surface and a second surface, a suspension member and a moveable mass secured thereto, wherein the moveable mass and/or at least part of the suspension member is/are adapted to vibrate when the vibration sensor is exposed to external vibrations, a read-out arrangement for detecting vibrations of the moveable mass and/or at least part of the suspension member, and a signal processor for at least processing an electric signal from the read-out arrangement, wherein the read-out arrangement comprises a capacitor formed by a first capacitor electrode and a second capacitor electrode separated by an air gap, and wherein the first capacitor electrode and/or the second capacitor electrode comprises one or more air venting channels in order to reduce squeeze film damping effects between the first and second capacitor electrodes. The present invention further relates to a hearing device comprising such a vibration sensor and use of the vibration sensor for voice recognition in a hearing device.