The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Oct. 15, 2023
Advanced Energy Industries, Inc., Denver, CO (US);
Donald J. Enzinna, Lockport, NY (US);
Advanced Energy Industries, Inc., Denver, CO (US);
Abstract
An electrostatic chuck system and method for determining workpiece bow are disclosed. The system includes a power supply configured to generate high DC voltages for chucking forces and low AC voltages for capacitance sensing. A multi-segmented chuck is driven by multiple outputs of the power supply. A capacitance monitor incorporated in the power supply measures load capacitance by sensing current due to the low AC voltages modulated on the high DC voltage. Capacitance is measured for one or more segments at a time with the low AC voltage portion of the signal inverted to the segments being measured. Measurements on inverted signals are performed until all segments have been measured and then a spread in the measured currents is used to assess wafer bow.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile