Graphene coated surfaces manufactured by atomic or molecular layer deposition

Abstract

A product comprising a graphene coated surface that has a 3D profile having a GAR higher than 3; and/or the normalized 50% thickness penetration depth of the graphene coated pattern is higher than 0.5. When the product is an interconnect it (i) has a grain size median lower than 0.9 micron; (ii) has a lower degree of shorts and voids compared to a similar interconnect exposed to temperatures equal or higher than 400° C.; (iii) is substantially free of diffusion barrier coating materials in the interconnect metal; (iv) is free of nitrogen doping, (v) is free of FeClresiduals; and/or (vi) is free of residual metal catalyst nanoparticles. The coating of 3D profile surface with graphene is obtained by molecular layer deposition of a graphene molecular precursor comprising an comprising at least one C-Caromatic hydrocarbon on top of the surface followed by transforming the molecular graphene precursor into a graphene coating by means of a carbon-carbon bond formation reaction.