The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Dec. 05, 2024
Dnf Co., Ltd., Daejeon, KR;
Jiho Ryu, Daejeon, KR;
Seung Son, Daejeon, KR;
Jun Hee Cho, Daejeon, KR;
Gun Joo Park, Daejeon, KR;
Sung Gi Kim, Daejeon, KR;
Yu Jin Cho, Daejeon, KR;
Haeng-Don Lim, Daejeon, KR;
DNF CO., LTD., Daejeon, KR;
Abstract
An aminoalkoxydisilazane compound, a composition for depositing a silicon-containing thin film including the aminoalkoxydisilazane compound, and a method of manufacturing a silicon-containing thin film using the aminoalkoxydisilazane compound are described. The aminoalkoxydisilazane compound is thermally stable and has strong volatility and reactivity, and is used as a silicon-containing precursor to form a silicon-containing thin film having excellent physical and electrical properties and high purity, by various deposition methods.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile