The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Sep. 19, 2024
Screen Holdings Co., Ltd., Kyoto, JP;
Chiaki Moriya, Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
A substrate processing device includes a processing chamber, three exhaust pipes, and an exhaust switching mechanism. The exhaust switching mechanism includes a switching box, three opening/closing mechanisms that individually open/close three communication ports for individually communicating the switching box and the three exhaust pipes, and three cleaning nozzles provided on an inner side of the switching box in correspondence with the three opening/closing mechanisms. Each of the three cleaning nozzles is provided to face the link mechanism of the corresponding opening/closing mechanism, and injects cleaning liquid to the link mechanism of the corresponding opening/closing mechanism.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile