The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2026

Filed:

Aug. 17, 2022
Applicant:

Lam Research Corporation, Fremont, CA (US);

Inventors:

Aleksey V. Altecor, Newberg, OR (US);

Andrew Borth, Newberg, OR (US);

Chi-Jung Cheng, Wilsonville, OR (US);

Assignee:

LAM RESEARCH CORPORATION, Fremont, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/26 (2006.01); B01D 53/30 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
B01D 53/265 (2013.01); B01D 53/30 (2013.01); C23C 16/4402 (2013.01); C23C 16/45561 (2013.01); B01D 2258/0216 (2013.01); B01D 2259/818 (2013.01);
Abstract

A gas separator device includes a first chamber including a first inlet to receive a gas mixture comprising first and second gases, and a first outlet. First and second Peltier devices are mounted to the first chamber to cool the first chamber to a first temperature. A second chamber is connected to the first chamber and includes a second outlet. Third and fourth Peltier devices are mounted to the first and second Peltier devices, respectively, and to the second chamber to cool the second chamber to a second temperature. The Peltier devices are configured to condense the second gas in the gas mixture in the first chamber and output the first gas via the first outlet. The Peltier devices are configured to transform the condensed second gas received from the first chamber in the second chamber into the second gas and output the second gas via the second outlet.


Find Patent Forward Citations

Quick Actions:

Altecor, Aleksey. (2026). Compact gas separator devices co-located on substrate processing systems (U.S. Patent No. 12766461). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12766461

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