The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2026
Filed:
Sep. 29, 2023
Semes Co., Ltd., Cheonan-si, KR;
Byungin An, Cheonan-si, KR;
Tae Yong Kim, Gunpo-si, KR;
SEMES CO., LTD., Cheonan-si, KR;
Abstract
Provided is a substrate processing apparatus and substrate processing method capable of increasing utilization of equipment and minimizing a footprint of the equipment, the substrate processing apparatus including a load port module loaded with a first carrier in which first substrates are stored, a transfer robot for transferring the first substrates from the first carrier, a first adaptor region for temporarily storing the first substrates transferred by the transfer robot, a second adaptor region for temporarily storing second substrates transferred by the transfer robot from a second carrier loaded onto the load port module, after the first carrier is unloaded from the load port module, and a controller for applying a first substrate transfer control signal to the transfer robot to store the first substrates, which were temporarily stored in the first adaptor region and on which a process is completed, in the empty second carrier.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile