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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12765311 B1

PDFFull Text
Date of Patent:
Oct. 13, 2026

Filed:

Jun. 22, 2023

Substrate processing system, substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

Applicant:

Kokusai Electric Corporation, Tokyo, JP;

Inventors:

Kazuyoshi Yamamoto, Toyama, JP;

Hidemoto Hayashihara, Toyama, JP;

Kayoko Yashiki, Toyama, JP;

Kyohei Kita, Toyama, JP;

Kazuhide Asai, Toyama, JP;

Assignee:

KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;

Attorney:

Volpe Koenig

Primary Examiner:

Mohammad Ali

Assistant Examiner:

Joshua T Sanders

Int. Cl.
CPC ...
H10P 72/00 (2026.01); G05B 19/042 (2006.01); G05B 19/418 (2006.01); H10P 72/30 (2026.01);
U.S. Cl.
CPC ...
H10P 72/0612 (2026.01); G05B 19/042 (2013.01); G05B 19/4183 (2013.01); H10P 72/0602 (2026.01); H10P 72/0604 (2026.01); H10P 72/3206 (2026.01); G05B 2219/45031 (2013.01);
Abstract

There is provided a technique, which includes: at least one substrate processing apparatus including a controller configured to be capable of controlling processing of a substrate according to a recipe including at least one step and a first memory configured to be capable of storing data of the at least one substrate processing apparatus that is reported during the processing of the substrate; and a data manager connected to the at least one substrate processing apparatus, configured to acquire the data, and configured to be capable of specifying the number of the at least one step that is included in the data to be acquired such that the data falls within a predefined data acquirable range.

Find Patent Forward Citations

Yamamoto, Kazuyoshi. (2026). Substrate processing system, substrate processing apparatus, method of manufacturing semiconductor device, and recording medium (U.S. Patent No. 12765311). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12765311

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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