The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2026

Filed:

Mar. 16, 2023
Applicant:

Ark Hdps Semiconductor Pte. Limited., Singapore, SG;

Inventor:

Chin-Fu Chen, Hsinchu County, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/66 (2025.01); H10D 30/01 (2025.01); H10D 62/10 (2025.01); H10D 64/27 (2025.01);
U.S. Cl.
CPC ...
H10D 30/668 (2025.01); H10D 30/0297 (2025.01); H10D 62/115 (2025.01); H10D 62/127 (2025.01); H10D 64/513 (2025.01);
Abstract

A semiconductor device includes a substrate and a well region both having a first conductivity type, a trench in the substrate and directly above the well region, a first trench gate and a second trench gate disposed in the trench and laterally separated from each other, a dielectric isolation portion disposed in the trench and between the first and second trench gates, and a dielectric liner in the trench and under bottom surfaces of the first and second trench gates. A middle region of a bottom surface of the dielectric isolation portion protrudes downward and is lower than two side regions of the bottom surface of the dielectric isolation portion. Below a horizontal line of the bottom surfaces of the first and second trench gates, the thickness of the dielectric isolation portion is greater than the thickness of the dielectric liner.


Find Patent Forward Citations

Quick Actions:

Chen, Chin-Fu. (2026). Semiconductor device with trench-typed power transistors and fabrication method thereof (U.S. Patent No. 12764996). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12764996

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