The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2026

Filed:

Jun. 30, 2021
Applicant:

Lumentum Operations Llc, San Jose, CA (US);

Inventors:

Guowei Zhao, Milpitas, CA (US);

Jun Yang, Cupertino, CA (US);

Ajit Vijay Barve, San Jose, CA (US);

Matthew Glenn Peters, Menlo Park, CA (US);

Assignee:

Lumentum Operations LLC, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 5/183 (2006.01); H01S 5/30 (2006.01); H01S 5/34 (2006.01); H01S 5/343 (2006.01);
U.S. Cl.
CPC ...
H01S 5/18311 (2013.01); H01S 5/18358 (2013.01); H01S 5/3095 (2013.01); H01S 5/3412 (2013.01); H01S 5/34306 (2013.01); H01S 2304/02 (2013.01); H01S 2304/04 (2013.01);
Abstract

A method of forming a vertical cavity surface emitting laser (VCSEL) device using a multiphase growth sequence includes forming a first mirror over a substrate; forming an active region (e.g., a dilute nitride active region) over the first mirror; forming an oxidation aperture (OA) layer over the active region; forming a spacer on a surface of the OA layer; and forming a second mirror over the spacer. The active region is formed using a molecular beam epitaxy (MBE) process during an MBE phase of the multiphase growth sequence and the second mirror is formed using a metal-organic chemical vapor deposition (MOCVD) process during an MOCVD phase of the multiphase growth sequence.


Find Patent Forward Citations

Zhao, Guowei. (2026). Multiphase growth sequence for forming a vertical cavity surface emitting laser (U.S. Patent No. 12763550). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12763550

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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