The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2026
Filed:
Jun. 08, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Shashidhara Patel H B, Bangalore, IN;
Muhannad Mustafa, Milpitas, CA (US);
Amit Sahu, Bangalore, IN;
Sanjeev Baluja, Campbell, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/00 (2006.01); B05B 1/24 (2006.01); H01L 21/02 (2006.01); H10P 14/20 (2026.01);
U.S. Cl.
CPC ...
B05B 1/005 (2013.01); B05B 1/24 (2013.01); H10P 14/3411 (2026.01); H10P 14/3454 (2026.01);
Abstract
Process chamber lids, processing chambers and methods using the lids are described. In some embodiments, the lid includes a showerhead with a plurality of heater segments in a peripheral region thereof. The heated showerhead minimizes temperature non-uniformity and/or minimizes heat less near the peripheral edge of a processed wafer.
Patel H B, Shashidhara. (2026). Showerhead heated by circular array (U.S. Patent No. 12758988). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12758988
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile