The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2026

Filed:

Apr. 20, 2023
Applicant:

Asm Ip Holding, B.v., Almere, NL;

Inventor:

Rami Khazaka, Leuven, BE;

Assignee:

ASM IP HOLDING B.V., Almere, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 14/20 (2026.01); C30B 25/18 (2006.01); C30B 29/52 (2006.01); C30B 31/06 (2006.01); C30B 33/08 (2006.01); H10D 30/01 (2025.01); H10D 30/67 (2025.01); H10D 62/10 (2025.01); H10D 62/13 (2025.01); H10P 14/24 (2026.01); H10P 50/24 (2026.01);
U.S. Cl.
CPC ...
H10P 14/3411 (2026.01); C30B 25/18 (2013.01); C30B 29/52 (2013.01); C30B 31/06 (2013.01); C30B 33/08 (2013.01); H10D 30/014 (2025.01); H10D 30/6735 (2025.01); H10D 30/675 (2025.01); H10D 62/119 (2025.01); H10D 62/151 (2025.01); H10P 14/24 (2026.01); H10P 14/2926 (2026.01); H10P 14/3454 (2026.01); H10P 50/242 (2026.01);
Abstract

Methods and systems for selectively forming crystalline boron-doped silicon germanium on a surface of a substrate. The methods can be used to selectively form the boron-doped silicon germanium within a gap from the bottom upward. Exemplary methods can be used to, for example, form source and/or drain regions in field effect transistor devices, such as in gate-all-around field effect transistor devices.


Find Patent Forward Citations

Khazaka, Rami. (2026). Method of selectively forming crystalline boron-doped silicon germanium on a surface (U.S. Patent No. 12757647). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12757647

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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