Abnormal irregularity cause identifying device, abnormal irregularity cause identifying method, and abnormal irregularity cause identifying program

Abstract

An abnormal irregularity cause identifying device includes a process data acquisition unit that reads process data output by sensors included in a production facility performing a batch stage and a continuous stage, a preprocessing unit that associates a range of a complete timing of the batch stage with an output timing of process data of the process data in the continuous stage based on a residence time of the processing target in the production facility, an abnormality determination unit that calculates an abnormality degree by using process data in the batch stage and process data in the continuous stage associated with each other by the preprocessing unit, and a cause diagnosis unit that determines, for each of the process data output by the corresponding one of the plurality of sensors, whether the abnormality degree calculated by the abnormality determination unit satisfies a predetermined criterion.