The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Feb. 21, 2022
Mitsubishi Electric Corporation, Tokyo, JP;
Takayuki Onaka, Tokyo, JP;
Tetsuhiro Fukao, Tokyo, JP;
Mitsubishi Electric Corporation, Tokyo, JP;
Abstract
A device inspection apparatus comprises: a plurality of probe heads; an inspection circuitry to measure inspection value data for each semiconductor device; a storage circuitry to store inspection result data including the inspection value data and a determination result on the semiconductor device; and an analysis circuitry to perform, by statistical processing based on a plurality of the inspection result data present for each inspection item and stored in the storage circuitry, an analysis to determine if there is a significant difference between a plurality of the inspection result data for each of the probe heads, and determines that a probe head concerned is abnormal if there is a significant difference.