The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Sep. 29, 2022
Applicant:
Uchicago Argonne, Llc, Chicago, IL (US);
Inventors:
Anil U. Mane, Naperville, IL (US);
Jeffrey W. Elam, Elmhurst, IL (US);
Assignee:
UCHICAGO ARGONNE, LLC, Chicago, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); G01K 17/08 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/4408 (2013.01); C23C 16/45527 (2013.01); C23C 16/45555 (2013.01); G01K 17/08 (2013.01);
Abstract
A calorimetry sensor having a porous substrate and a temperature sensitive resistive coating. The calorimetry sensor has a known temperature coefficient of resistance. A process utilizes the known temperature coefficient of resistance and monitors changes in resistance of the calorimetry sensor to determine changes in temperature (heat) within an environment, such as during reactions within an ALD reactor.