The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Jul. 10, 2024
Applicant:
Rohm Co., Ltd., Kyoto, JP;
Inventors:
Daisuke Nishinohara, Kyoto, JP;
Toma Fujita, Kyoto, JP;
Assignee:
ROHM CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0056 (2013.01); G01P 15/125 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/04 (2013.01);
Abstract
Provided is a MEMS device including a substrate that has a first principal surface and a second principal surface facing the first principal surface, and in which a cavity recessed from the first principal surface side to the second principal surface side is disposed, and a MEMS electrode that is disposed within the cavity, and that is separated from a bottom surface of the cavity to the first principal surface side. The MEMS includes a movable electrode finger, a fixed electrode finger, a beam portion, and an electrode portion. The electrode portion includes a first electrode finger and a second electrode finger.