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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12753067 B1

PDFFull Text
Date of Patent:
Oct. 06, 2026

Filed:

Apr. 18, 2023

Mems structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof

Applicant:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Inventors:

Mikel Azpeitia Urquia, Milan, IT;

Enri Duqi, Milan, IT;

Silvia Nicoli, Briosco, IT;

Roberto Campedelli, Novate Milanese, IT;

Igor Varisco, Settimo Milanese, IT;

Lorenzo Tentori, Verano Brianza, IT;

Assignee:

STMicroelectronics S.r.l., Agrate Brianza, IT;

Attorney:

Seed Intellectual Property Law Group LLP

Primary Examiner:

Samuel A Gebremariam

Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/001 (2013.01); B81C 1/00158 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/033 (2013.01); B81B 2203/0361 (2013.01); B81B 2207/11 (2013.01); B81C 2201/014 (2013.01); B81C 2201/0156 (2013.01); B81C 2201/0169 (2013.01); B81C 2201/0177 (2013.01);
Abstract

MEMS structure, comprising: a semiconductor body; a cavity buried in the semiconductor body; a membrane suspended on the cavity; and at least one antistiction bump completely contained in the cavity with the function of preventing the side of the membrane internal to the cavity from sticking to the opposite side, which delimits the cavity downwardly.

Find Patent Forward Citations

Azpeitia Urquia, Mikel. (2026). Mems structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof (U.S. Patent No. 12753067). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12753067

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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