The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Apr. 18, 2023
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Mikel Azpeitia Urquia, Milan, IT;
Enri Duqi, Milan, IT;
Silvia Nicoli, Briosco, IT;
Roberto Campedelli, Novate Milanese, IT;
Igor Varisco, Settimo Milanese, IT;
Lorenzo Tentori, Verano Brianza, IT;
Assignee:
STMicroelectronics S.r.l., Agrate Brianza, IT;
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/001 (2013.01); B81C 1/00158 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/033 (2013.01); B81B 2203/0361 (2013.01); B81B 2207/11 (2013.01); B81C 2201/014 (2013.01); B81C 2201/0156 (2013.01); B81C 2201/0169 (2013.01); B81C 2201/0177 (2013.01);
Abstract
MEMS structure, comprising: a semiconductor body; a cavity buried in the semiconductor body; a membrane suspended on the cavity; and at least one antistiction bump completely contained in the cavity with the function of preventing the side of the membrane internal to the cavity from sticking to the opposite side, which delimits the cavity downwardly.