The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Dec. 14, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Sonam Dorje Sherpa, San Ramon, CA (US);
Alok Ranjan, San Ramon, CA (US);
Geuntak Lee, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 50/24 (2026.01);
U.S. Cl.
CPC ...
H10P 50/242 (2026.01);
Abstract
A method includes obtaining a substrate, and etching a portion of the substrate using an etch process performed at a temperature of less than or equal to about zero degrees Celsius. Etching the portion of the substrate includes forming an etchant on the substrate using vapor adsorption.