The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Feb. 03, 2023
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventor:
Su Ryong Bang, Chungcheongnam-do, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32642 (2013.01); H01J 37/32715 (2013.01);
Abstract
A focus ring capable of evaluating a plurality of focus ring shapes is provided. A focus ring unit, as a focus ring used in a substrate processing device includes a plurality of parts with different conditions of an exposed surface facing a plasma space in a circumferential direction.