The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Dec. 07, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Vijay D. Parkhe, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C09D 127/18 (2006.01); C09D 5/08 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32495 (2013.01); C09D 127/18 (2013.01); C09D 5/08 (2013.01); Y10T 428/1352 (2015.01);
Abstract
A chamber component for a semiconductor processing chamber includes a body. The chamber component also includes a coating. The coating is a corrosion-resistant coating. The coating is deposited on a surface of the body. The corrosion-resistant coating includes a perfluoroelastomer material.