The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Oct. 26, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Garrett Ho-Yee Sin, Sunnyvale, CA (US);
Sidharth Bhatia, Santa Cruz, CA (US);
Katty Marie Lydia Gamon Guyomard, Los Altos, CA (US);
Shawyon Jafari, Sunnyvale, CA (US);
Heng-Cheng Pai, Cupertino, CA (US);
Pramod Nambiar, Sunnyvale, CA (US);
Paul Lukas Brillhart, Pleasanton, CA (US);
Ilker Durukan, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes identifying sets of part data associated with substrate processing equipment. Each of the sets of part data includes corresponding part values and a corresponding part identifier. Each of the sets of part data is associated with hardware parameters of a corresponding equipment part of substrate processing equipment. The method further includes generating sets of aggregated data. Each of the sets of aggregated data includes a corresponding set of part data of the sets of part data and a corresponding set of additional non-part data of sets of non-part data. The method further includes causing, based on the sets of aggregated data, performance of a corrective action associated with the substrate processing equipment.