The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2026

Filed:

Sep. 12, 2024
Applicant:

Semes Co., Ltd., Cheonan-si, KR;

Inventors:

Ki Won Han, Anseong-si, KR;

Doo Hyun Baek, Hwaseong-si, KR;

Hee Chan Kim, Hwaseong-si, KR;

Tae Kyung Kong, Cheonan-si, KR;

Dong Kyum Kim, Cheonan-si, KR;

Assignee:

SEMES CO., LTD., Chungcheongnam-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 7/16 (2006.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
G03F 7/70808 (2013.01); G03F 7/16 (2013.01); G03F 7/7075 (2013.01); H10P 72/0448 (2026.01); H10P 72/0458 (2026.01); H10P 72/0461 (2026.01); H10P 72/0474 (2026.01);
Abstract

A storage and transfer module includes a module body, a storage and transfer unit disposed in the module body, the storage and transfer unit including a liftable transfer portion, and a storage portion disposed on the outside of the transfer portion, the storage portion having a storage space therein, and a transfer target portion in which a substrate is transferred by the transfer portion. A pair of the storage and transfer units are provided. The pair of storage and transfer units are disposed to oppose each other with the transfer target portion interposed therebetween. A substrate loading portion is disposed on one side of the storage and transfer units.


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