Microelectromechanical acceleration sensor

Abstract

A microelectromechanical acceleration sensor. The sensor has a substrate, a movably suspended heavy mass, four movably suspended lightweight masses, and four electrode systems, and is designed to be at least rotationally symmetrical. The heavy mass laterally encloses the lightweight masses and the electrode systems. Each electrode system has two electrode structures. Each electrode structure has fixed electrodes and movable electrodes. The movable electrodes are connected to the masses. Movable and fixed electrode surfaces interlock and form electrical capacitances. The masses are coupled to one another such that a deflection of the heavy mass parallel to the substrate and in a direction perpendicular to fixed and movable electrode surfaces of two opposing electrode systems causes the lightweight masses connected to the opposing electrode systems to be deflected in the opposite direction.