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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12747258 B1

PDFFull Text
Date of Patent:
Sep. 29, 2026

Filed:

Jun. 21, 2023

Metal oxide thin film precursor, method of fabricating metal oxide thin film using the same, and semiconductor device including the metal oxide thin film

Applicant:

University-industry Cooperation Group of Kyung Hee University, Yongin-si, KR;

Inventors:

Jongwook Park, Seoul, KR;

Woojin Jeon, Yongin-si, KR;

Sunwoo Park, Gwangju-si, KR;

Hayoon Lee, Incheon, KR;

Sang Wook Park, Paju-si, KR;

Yoona Choi, Seoul, KR;

Assignee:

UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY, Yongin-si, KR;

Attorney:

LEX IP MEISTER, PLLC

Primary Examiner:

Alexander R Pagano

Int. Cl.
CPC ...
C07F 17/00 (2006.01); C01G 25/02 (2006.01); C01G 27/02 (2006.01); C07B 59/00 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H10P 14/60 (2026.01); H10P 14/692 (2026.01);
U.S. Cl.
CPC ...
C07F 17/00 (2013.01); C01G 25/02 (2013.01); C01G 27/02 (2013.01); C07B 59/00 (2013.01); C23C 16/405 (2013.01); C23C 16/45529 (2013.01); C23C 16/45553 (2013.01); H10P 14/668 (2026.01); H10P 14/69392 (2026.01); H10P 14/69395 (2026.01); C01P 2002/72 (2013.01); C01P 2002/88 (2013.01); C01P 2006/40 (2013.01); C07B 2200/05 (2013.01);
Abstract

Disclosed are a metal oxide thin film precursor represented by Chemical Formula 1, a method of fabricating a metal oxide thin film using the same, and a semiconductor device including the metal oxide thin film. The definition of Chemical Formula 1 is as described in the detailed description.

Find Patent Forward Citations

Park, Jongwook. (2026). Metal oxide thin film precursor, method of fabricating metal oxide thin film using the same, and semiconductor device including the metal oxide thin film (U.S. Patent No. 12747258). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12747258

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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