Feeding apparatus and substrate processing device

Abstract

A feeding apparatus and a substrate processing device are provided. The feeding apparatus includes: a material conveying channel including a feeding inlet and a discharging outlet, where the feeding inlet is closer to a first end of the material conveying channel than the discharging outlet, and the discharging outlet is closer to a second end of the material conveying channel than the feeding inlet, the first end and the second end being two opposite ends of the material conveying channel; and a vibration generator disposed at the material conveying channel and configured to generate mechanical vibration to induce the mechanical vibration of the feeding apparatus, and a material entering the material conveying channel through the feeding inlet is conveyed to the discharging outlet under the action of the mechanical vibration and falls out through the discharging outlet under the action of gravity.