The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2026

Filed:

Aug. 24, 2022
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Hyunmook Choi, Suwon-si, KR;

Jihong Kim, Seoul, KR;

Kyoungcho Na, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10B 43/27 (2023.01); G11C 16/14 (2006.01); H10B 41/10 (2023.01); H10B 41/27 (2023.01); H10B 41/35 (2023.01); H10B 43/10 (2023.01); H10B 43/35 (2023.01);
U.S. Cl.
CPC ...
H10B 43/27 (2023.02); G11C 16/14 (2013.01); H10B 41/10 (2023.02); H10B 41/27 (2023.02); H10B 41/35 (2023.02); H10B 43/10 (2023.02); H10B 43/35 (2023.02);
Abstract

A method for manufacturing a semiconductor device including forming a first substrate and a second substrate thereon; forming a first stack region by alternately stacking first interlayer insulating and sacrificial layers on the second substrate; forming a second stack region by alternately stacking second interlayer insulating and sacrificial layers on the first stack region; forming first openings spaced apart from each other in the first direction by partially removing the second stack region; forming a first filling insulating layer in the first openings; forming a second opening by partially removing the second stack region between the first openings; removing the second sacrificial layers exposed through the second opening; forming a lower separation region including the first filling insulating layer and a second filling insulating layer, by forming the second filling insulating layer in the second opening and regions in which the second sacrificial layers have been removed.


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