The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2026
Filed:
Dec. 12, 2024
Gudeng Equipment Co., Ltd., New Taipei City, TW;
Yu-Lin Chen, New Taipei City, TW;
Bing-Hong Tsai, New Taipei City, TW;
Wei-Chen Wang, New Taipei City, TW;
GUDENG EQUIPMENT CO., LTD., New Taipei City, TW;
Abstract
A reticle clamping module includes two clamping mechanisms and a plurality of anti-slip filler members. The two clamping mechanisms are disposed opposite to each other to form a reticle space. Each of the two clamping mechanisms includes a clamping member and a power member. A reticle contact surface of the clamping member is provided with a first groove, the power member is disposed at a back surface of the clamping member opposite to the reticle contact surface to push the clamping member to reciprocate, and the plurality of anti-slip filler members are respectively disposed in the first grooves of the two clamping mechanisms. The reticle clamping module of the present disclosure is capable of securely clamping and preventing damage of a reticle, as well as preventing the reticle from scratches or inappropriate forces applied thereupon.