The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2026
Filed:
Apr. 26, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Carlaton Wong, Sunnyvale, CA (US);
Reyn Tetsuro Wakabayashi, San Jose, CA (US);
Assignee:
Applied Materials Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05B 1/18 (2006.01); F16B 29/00 (2006.01); F16B 37/04 (2006.01); F16B 37/12 (2006.01);
U.S. Cl.
CPC ...
B05B 1/18 (2013.01); F16B 29/00 (2013.01); F16B 37/041 (2013.01); F16B 37/122 (2013.01);
Abstract
Embodiments of showerhead assemblies and fasteners for use in coupling components of showerhead assemblies are provided herein. More particularly, the fasteners described herein can advantageously be used to connect a gas distribution plate to a backing plate of the showerhead assembly. The fasteners described herein can further advantageously be used to robustly connect components together where the components have different coefficients of thermal expansion.