The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Jul. 01, 2024
Applicant:
Mico Ceramics Ltd., Anseong-si, KR;
Assignee:
MiCo Ceramics Ltd., Anseong-si, KR;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H10P 72/00 (2026.01); H10P 72/76 (2026.01);
U.S. Cl.
CPC ...
H10P 72/7624 (2026.01); H10P 72/06 (2026.01); H10P 72/7616 (2026.01);
Abstract
Disclosed is to a ceramic susceptor. The ceramic susceptor of the present disclosure may include: a base substrate having a gas flow path configured to supply cooling gas; an insulating plate fixed on the base substrate and having a gas hole penetrating the insulating plate in the thickness direction thereof; and a discharge prevention pin inserted into the gas hole and extending in the length direction of the gas hole.