The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Mar. 09, 2023
Seiko Epson Corporation, Tokyo, JP;
Masahiro Fujii, Shiojiri, JP;
Ryuichi Kurosawa, Suwa-gun Hara-mura, JP;
SEIKO EPSON CORPORATION, Tokyo, JP;
Abstract
A vibrator device includes: an element substrate including a frame portion having a first surface and a second surface, and a vibrator element disposed inside the frame portion; a first substrate having a third surface and a fourth surface, the first substrate being bonded to the first surface of the frame portion at the third surface; a second substrate having a fifth surface and a sixth surface, the second substrate being bonded to the second surface of the frame portion at the fifth surface; and a cavity surrounded by the frame portion, the first substrate, and the second substrate. The second substrate includes a through electrode at a position overlapping the frame portion in the plan view. An outer shape of the through electrode in the sixth surface in the plan view includes a first portion and a second portion. The first portion is located at a position closer to the cavity than is the second portion. A curvature of the first portion is smaller than a curvature of the second portion.