The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Sep. 27, 2022
Seiko Epson Corporation, Tokyo, JP;
Keiichi Yamaguchi, Ina, JP;
Hiyori Sakata, Minowa, JP;
Shigeru Shiraishi, Ina, JP;
Ryuta Nishizawa, Nagano, JP;
SEIKO EPSON CORPORATION, , JP;
Abstract
A method of manufacturing a vibration element includes: a protective film forming step of forming a protective film on a first substrate surface of a crystal substrate; and a dry etching step of dry-etching the crystal substrate via the protective film. The protective film satisfies a relationship of T<T<T, in which Tis a thickness of the protective film in an inter-arm region positioned between a first vibration arm forming region in which a first vibration arm is formed and a second vibration arm forming region in which a second vibration arm is formed, Tis a thickness of the protective film in a groove forming region in which a groove is formed, and Tis a thickness of the protective film in a region of the first vibration arm forming region and the second vibration arm forming region excluding the groove forming region.