The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Dec. 08, 2023
Applicant:
Trumpf Huettinger Gmbh + Co. KG, Freiburg, DE;
Inventor:
Florian A. Maier, Pfaffenweiler, DE;
Assignee:
TRUMPF HUETTINGER GMBH + CO. KG, Freiburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32926 (2013.01); H01J 37/3299 (2013.01); H01J 2237/327 (2013.01);
Abstract
A signal processing system includes an acquisition device configured to acquire a repeating signal trace in a specified time interval. The signal trace varies as a function of a plasma process state of a plasma process. The signal processing system further includes a determining device configured to generate a data stream describing the plasma process, based on at least two signal traces acquired in one time interval each. The data stream contains a continuously determined stability indicator for the plasma process.