The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Aug. 24, 2020
Hitachi High-tech Corporation, Tokyo, JP;
Hideki Tsushima, Tokyo, JP;
Naoya Ishigaki, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A charged particle beam device according to the present invention comprises a charged particle source that emits charged particles, a detection circuit that detects electrons which are generated by a sample as a result of irradiation with the charged particles, and a power storage device (_VHD) that holds direct voltage, and comprises a charge circuit (_CHG) that charges the power storage device with supplied voltage, and a control circuit (_CTL) that controls the charge circuit such that charging is carried out in a period in which no sample is measured, wherein the direct voltage held by the power storage device (_VHD) is used as operating voltage.