The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Dec. 28, 2021
Hitachi High-tech Corporation, Tokyo, JP;
Hirohisa Enomoto, Tokyo, JP;
Kenichi Nishinaka, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
A charged particle beam device includes: an inclination mechanism driving unit configured to generate a driving force; an inclination driving force transmission unit configured to transmit the driving force; and an inclination mechanism unit having first and second load transmission units, first, second and third deformation units, and an inclinable sample holding unit. The first load transmission unit moves in a load direction by the load from the inclination driving force transmission unit and transmits the load to the first deformation unit. The second load transmission unit rotates about the second deformation unit as a fulcrum by a torque generated by deformation of the first deformation unit and transmits the load to the third deformation unit. The sample holding unit rotates about the fourth deformation unit as a fulcrum opposite to a direction of the second load transmission unit by a torque generated by deformation of the third deformation unit.