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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12736872 B1

PDFFull Text
Date of Patent:
Sep. 15, 2026

Filed:

Jul. 19, 2022

Imprinting apparatus

Applicant:

Koninklijke Philips N.v., Eindhoven, NL;

Inventors:

Didier Mathijs Maria Justina Petit, Aachen, DE;

Johannes Balthasar Maria Soetens, Eindhoven, NL;

Marcus Antonius Verschuuren, Eindhoven, NL;

Maurice Leonardus Johannes Janssen, Aachen, DE;

Assignee:

Koninklijke Philips N.V., Eindhoven, NL;

Attorney:
Primary Examiner:

Deoram Persaud

Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 33/42 (2006.01); B29C 43/02 (2006.01); B29C 43/58 (2006.01); B29C 59/00 (2006.01); B29C 59/02 (2006.01); B29K 105/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 33/424 (2013.01); B29C 43/021 (2013.01); B29C 43/58 (2013.01); B29C 59/002 (2013.01); B29C 59/02 (2013.01); G03F 7/707 (2013.01); G03F 7/70733 (2013.01); G03F 7/70758 (2013.01); G03F 7/70775 (2013.01); G03F 7/70783 (2013.01); G03F 7/70875 (2013.01); B29C 2033/426 (2013.01); B29C 2043/025 (2013.01); B29K 2105/0061 (2013.01);
Abstract

An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The first and second carriers are arranged such that the flexible stamp can be made to contact the substrate. The second carrier comprises a main frame which may be moved (relative to a reference frame) in a Z axis direction by a main actuator, and a chuck with a set of three chuck actuators, each with a stroke smaller than the stroke of the main actuator, for translating a portion of the chuck relative to the main frame in the Z-axis direction. The Z axis movement of the chuck is divided into two stages, with separate long stroke and short stroke drivers. This enables a very stiff support to be created with precise imprint gap control.

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