The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2026

Filed:

Aug. 04, 2024
Applicant:

Lumus Ltd., Nes Ziona, IL;

Inventor:

Ido Eisenberg, Nes Ziona, IL;

Assignee:

LUMUS LTD., Nes Ziona, IL;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/26 (2006.01); G01C 9/06 (2006.01); G01M 11/02 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G01B 11/26 (2013.01); G01C 9/06 (2013.01); G01M 11/0242 (2013.01); G01C 2009/066 (2013.01); G01N 2021/9511 (2013.01);
Abstract

Disclosed herein is a method including: providing a light guiding arrangement (LGA) configured to redirect light, incident thereon in a direction perpendicular to an external surface of the sample, into or onto the sample, such that light impinges on an internal facet of the sample nominally normally thereto; generating a first incident light beam (LB), directed at the external surface normally thereto, and a second incident LB, parallel to the first incident LB and directed at the LGA; obtaining a first returned LB by reflection of the first incident LB off the external surface, and a second returned LB by redirection by the LGA of the second incident LB into or onto the sample, reflection thereof off the internal facet, and inverse redirection by the LGA; measuring an angular deviation between the returned LBs and deducing therefrom an actual inclination angle of the internal facet relative to the external surface.


Find Patent Forward Citations

Loading…