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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12734562 B1

PDFFull Text
Date of Patent:
Sep. 15, 2026

Filed:

Mar. 14, 2022

Vacuum processing device and foreign matter ejection method

Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Taiki Kobayashi, Tokyo, JP;

Seiichiro Kanno, Tokyo, JP;

Go Miya, Tokyo, JP;

Yuuta Yanbe, Tokyo, JP;

Assignee:

Hitachi High-Tech Corporation, Tokyo, JP;

Attorney:

Crowell & Moring LLP

Primary Examiner:

Kaj K Olsen

Assistant Examiner:

Arlyn I Rivera-Cordero

Int. Cl.
CPC ...
B08B 9/00 (2006.01); B08B 13/00 (2006.01); G05B 15/02 (2006.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
B08B 9/00 (2013.01); B08B 13/00 (2013.01); G05B 15/02 (2013.01); H10P 72/0402 (2026.01);
Abstract

A vacuum processing apparatus includes a computer system, a transport unit configured to transport a sample, a vacuum sample chamber where the sample is processed in a vacuum, and a preliminary exhaust chamber into which the sample is loaded before being transported to the vacuum sample chamber. A partition wall is disposed between the vacuum sample chamber and the preliminary exhaust chamber. The computer system controls an operation of the partition wall to close a gap between the vacuum sample chamber and the preliminary exhaust chamber.

Find Patent Forward Citations

Kobayashi, Taiki. (2026). Vacuum processing device and foreign matter ejection method (U.S. Patent No. 12734562). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12734562

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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