The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Mar. 14, 2022
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Assignee:
Hitachi High-Tech Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 9/00 (2006.01); B08B 13/00 (2006.01); G05B 15/02 (2006.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
B08B 9/00 (2013.01); B08B 13/00 (2013.01); G05B 15/02 (2013.01); H10P 72/0402 (2026.01);
Abstract
A vacuum processing apparatus includes a computer system, a transport unit configured to transport a sample, a vacuum sample chamber where the sample is processed in a vacuum, and a preliminary exhaust chamber into which the sample is loaded before being transported to the vacuum sample chamber. A partition wall is disposed between the vacuum sample chamber and the preliminary exhaust chamber. The computer system controls an operation of the partition wall to close a gap between the vacuum sample chamber and the preliminary exhaust chamber.