The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Oct. 13, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Vijayabhaskara Venkatagiriyappa, Bangalore, IN;
Laxman Vitthalrao Deshmukh, Bangalore, IN;
Chau T. Nguyen, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/50 (2006.01); H05B 3/00 (2006.01); H10P 72/00 (2026.01); H10P 72/76 (2026.01);
U.S. Cl.
CPC ...
H10P 72/7624 (2026.01); H05B 3/0047 (2013.01); H10P 72/0432 (2026.01); H10P 72/0602 (2026.01);
Abstract
Apparatus and methods for cooling down a susceptor assembly are described. A heat exchange passage in a susceptor assembly thermal break transfers heat from processing gases that flow through the susceptor assembly to a cooling jacket and cools down the susceptor assembly and associated hardware.
Venkatagiriyappa, Vijayabhaskara. (2026). Susceptor assembly thermal break and methods for cooling a susceptor assembly (U.S. Patent No. 12733453). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12733453
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