The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Dec. 28, 2022
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventor:
Chang Jun Park, Pyeongtaek-si, KR;
Assignee:
SEMES Co., Ltd., Cheonan-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10P 72/30 (2026.01); B65G 47/90 (2006.01); H10P 72/00 (2026.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H10P 72/3402 (2026.01); B65G 47/90 (2013.01); H10P 72/0606 (2026.01); H10P 72/0608 (2026.01); H10P 72/0616 (2026.01); H10P 72/3406 (2026.01); H10P 72/3411 (2026.01);
Abstract
The present invention provides an apparatus for treating a substrate. The apparatus for treating a substrate comprises: a first module; and a treating module configured to treat the substrate, and the first module includes: a load port on which a container having the substrate accommodated therein is placed; a transfer unit having a hand that transfers the substrate between the load port and the treating module; and an observation unit mounted in the transfer unit and configured to observe a state of the substrate accommodated in the container.