The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2026

Filed:

Jun. 02, 2022
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventor:

Chieko Shigeno, Yokkaichi, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10B 43/27 (2023.01); H10B 41/27 (2023.01);
U.S. Cl.
CPC ...
H10B 43/27 (2023.02); H10B 41/27 (2023.02);
Abstract

In one embodiment, a semiconductor device includes a substrate, and a stacked film including a plurality of first layers and a plurality of second layers alternately provided on the substrate. The device further includes a charge storage layer provided on a side face of the stacked film via a first insulator, and a semiconductor layer provided on a side face of the charge storage layer via a second insulator. Furthermore, one of the plurality of first layers includes a first region that includes carbon having a first concentration, and a second region that includes carbon having a second concentration higher than the first concentration, and includes a lower side region provided on a lower side of the first region or an upper side region provided on an upper side of the first region.


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