The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2026

Filed:

Apr. 19, 2023
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventor:

Tetsuya Kimura, Nagaokakyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/17 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02031 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 9/176 (2013.01);
Abstract

A piezoelectric thin film includes a piezoelectric element and a substrate supporting the piezoelectric element. The piezoelectric element includes a piezoelectric thin film and first and second electrodes opposing each other with the piezoelectric thin film interposed therebetween. The piezoelectric thin film has a first-electrode-side content of each of aluminum and scandium higher than a second-electrode-side content thereof and a first-electrode-side content of nitrogen lower than a second-electrode-side content thereof.


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