The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Dec. 06, 2022
Semes Co., Ltd., Chungcheongnam-do, KR;
Myeong Jun Lim, Gyeonggi-do, KR;
Kwang Sup Kim, Chungcheongnam-do, KR;
Yeon Chul Song, Seoul, KR;
Ji Hoon Yoo, Gyeonggi-do, KR;
Jong Min Lee, Gyeonggi-do, KR;
Jun Ho Oh, Gyeonggi-do, KR;
Young Ho Park, Incheon, KR;
SEMES CO., LTD., Chungcheongnam-do, KR;
Abstract
Provided are a nozzle inspection unit configured to generate a large amount of defect data to improve detection accuracy of a defective nozzle, and a substrate treatment apparatus including the same. The nozzle inspection unit includes: a data collection module configured to collect a plurality of image data related to nozzles; a data classification module configured to classify the plurality of image data according to predefined classes; a data merging module configured to merge good image data related to a normal nozzle and defect image data related to a defective nozzle from among the plurality of image data; a data training module configured to train a plurality of merged image data obtained through the data merging module; and a defect data generation module configured to generate a plurality of final image data from the plurality of merged image data based on the training result.