The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Apr. 30, 2024
Canon Kabushiki Kaisha, Tokyo, JP;
Hirotoshi Torii, Tochigi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprinting apparatus that brings a mold with a pattern into contact with an imprinting material applied to a substrate and forms the pattern of the imprinting material on the substrate is provided. The imprinting apparatus includes: an imprinting head including a fixing unit, a movable unit base that is connected via a first flexible member from the fixing unit, a mold holding member that holds the mold, and a second flexible member that connects the movable unit base to the mold holding member; a first driving mechanism configured to drive the imprinting head to bring the mold held by the mold holding member into contact with the imprinting material on the substrate held by a substrate holding unit; a control unit configured to control the first driving mechanism; and a first measurer configured to measure a strain amount or a deformation amount of the second flexible member, or a relative position of the mold holding member or the mold to the movable unit base.