The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Sep. 26, 2024
Tsinghua University, Beijing, CN;
Chen Wang, Beijing, CN;
Simian Zhang, Beijing, CN;
Yuqi Wang, Beijing, CN;
Xiaonan Deng, Beijing, CN;
Yifei Wu, Beijing, CN;
Zhengcao Li, Beijing, CN;
Tsinghua University, Beijing, CN;
Abstract
The present disclosure relates to a non-destructive in-situ measurement device and method based on Raman analysis. The device comprises: a laser light source that emits a laser beam; a focusing component that focuses the laser beam above a movable sample stage, with the focal plane of the focusing component positioned at an initial position. During measurement, the focal plane is controlled to move from the initial position to the surface, side, or bottom of the structure under test. The movable sample stage holds the sample to be measured and can move in a plane perpendicular and/or parallel to the optical axis. The axis of the structure under test is parallel to the optical axis and located within the laser beam's focal region. A detection module collects specific Raman scattering signals returned from the sample under test, and the structure's planar and three-dimensional parameters are determined based on the collected results.