The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2026

Filed:

Dec. 28, 2021
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Naonori Kita, Tokyo, JP;

Masanori Arai, Tokyo, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
G01B 11/2408 (2013.01);
Abstract

An optical device for inspecting a to-be-inspected surface having a riblet structure in which projections each extending in a first direction are provided in a second direction intersecting the first direction is configured to include a condensing optical system that irradiates an irradiation region on the to-be-inspected surface with light from a light source and that condenses light reflected by the irradiation region; and a photodetector that has a photosensitive surface disposed on a plane different from a plane conjugate to the to-be-inspected surface with respect to the condensing optical system, and that detects intensity distribution of the light condensed by the condensing optical system.


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