The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Dec. 30, 2022
Applicant:
Asm Ip Holding, B.v., Almere, NL;
Inventors:
René Henricus Jozef Vervuurt, Leuven, BE;
Timothee Blanquart, Oud-Heverlee, BE;
Viljami Pore, Helsinki, FI;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H10P 14/60 (2026.01); H10W 10/00 (2026.01); H10W 10/17 (2026.01);
U.S. Cl.
CPC ...
C23C 16/45542 (2013.01); H10P 14/6336 (2026.01); H10P 14/6339 (2026.01); H10P 14/6532 (2026.01); H10W 10/014 (2026.01); H10W 10/17 (2026.01);
Abstract
Methods and systems for filling a gap comprised in the substrate with a gap filling fluid. The gap filling fluid is formed in a plasma with a first precursor and a second precursor.